Spreadsheet-style programming makes creating process recipes easy. A 200 line program capability and a large program storage capacity eliminates the need to link programs together or to frequently load programs into memory.

The Linear Transfer Arm (LTA) is designed for rigorous use yet has the soft touch required to handle fragile substrates like 150mm GaAs wafers and backside-ground 200mm Si wafers. A microstepping motor precisely positions substrates at each process module.

An advanced servo motor delivers uniform spin speeds and acceleration ramp rates for precise, repeatable film thickness coating. The need for continual calibration is eliminated.

SITE's FilmStar coater nozzle assembly incorporates four easily replaced dispense nozzles plus topside edge bead removal (EBR). The Traversing Dispense Arm (TDA) utilizes the same stepper motor technology as the LTA, providing precise, repeatable dispense centering.

Tractrix™ developer systems use our DevStar nozzle which provides rapid wafer wetting, minimal chemical consumption and outstanding CD uniformity.

Advanced hotplate design produces clean, uniform proximity baking. A fuzzy logic temperature controller provides rapid temperature ramp with no overshoot.

By minimizing moving parts, eliminating pneumatic sensors and managing cabinet air flow, the Tractrix™ system exhibits extremely few particles per wafer pass.