Tractrix™ Spin Track

The Tractrix™ spin tool is a stand alone, small-footprint track system designed for the spin deposition of photoresist, developer, polymer and other materials common to integrated circuit photolithography. Built with the philosophy of "one controller for one track," the Tractrix™ tool is highly reliable. Its proprietary, single-axis linear transfer arm (LTA) will gently and efficiently transport substrates ranging from 2" to 200mm between the process modules.

 Get the data sheet

Versatile Investment

Owing to its unique, efficient design, the Tractrix™ system is easier to operate and requires far less maintenance than any other track system utilizing multi-axis robotic transfer. The tool's flexibility makes it a low-cost solution for production, R&D, special applications, or as a backup system when other tracks are off-line for maintenance. Whether your process is g-line, i-line, DUV, low-k dielectric or something completely unique, SITE's Tractrix™ system can be configured accordingly.