The Tractrix™ Spin Track spin developer tool is a stand alone, small-footprint track system designed for the production of spin developed materials common to integrated circuit photolithography. Built with the philosophy of 'one controller for one track', the Tractrix™ Spin Track tool is highly reliable. Its proprietary, single-axis linear transfer arm (LTA) will gently and efficiently transport substrates ranging from 2 inches to 200 mm between the process modules.

Owing to its unique, efficient design, the Tractrix™ system is easier to operate and requires far less maintenance than any other track system utilizing multi-axis robotic transfer. The tool's flexibility makes it a low-cost solution for production, R&D, special applications, or as a backup system when other tracks are off-line for maintenance. Whether your process is g-line, i-line, DUV, low-k dielectric or something completely unique, SITE's Tractrix™ system can be configured accordingly.

For more information on SITE's Tractrix™ spin developer system, please browse our site.

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