SITE Services, Inc -

SITE manufactures two models of track tools: The Tractrix™ Spin Track and the ESVG (Enhanced SVG) System

Tractrix™ Spin Tool

SpinBall™ Single-wafer Spin Station

Cartridge Dispense System

Manual Bake Oven

Enhanced SVG System

Tractrix™ Spin Tool

The Tractrix™ tool is our top-of-the-line, small-footprint spin track. If you seek to process substrates from 2" to 200mm, need PC control and programmability, and require uniformity on a par with tier-1 systems, you've come to the right place. The Tractrix™ product not only encompasses all of the above, it fits into a very small footprint with an equally small price tag.

SpinBall™ Single-wafer Spin Station

The SpinBall Spin Station is a small, manually-loaded tool designed for the spin deposition of photoresist, developer, polymer and other materials common to integrated circuit photolithography. Built using the same proven technology of our production-grade Tractrix™ spin track, the SpinBall spin tool contains many of the same advanced components and automatic capabilities.

The SpinBall tool retains many Tractrix-style key features such as the advanced spin module, hot plate, and Windows®-based easy-to-use control software. It's all packaged in an economical, manually-loaded, single-wafer system.

The SpinBall tool is flexible. It can contain just a spin module with all wafer load/unload and dispenses performed manually by the operator. Likewise, it can be configured to automatically dispense, spin, bake and chill completely under program control. You decide.

The tool will handle substrates sized from 2” to 300mm and is perfect for compound semiconductor applications and R&D.

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Cartridge Dispense System

Our new Cartridge Dispense System (CDS) is a cost effective, low volume dispense unit. The controller will interface with the Tractrix Spin Tool and the SpinBall Single-wafer Spin System.

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Manual Bake Oven with Timer

For manual bake applications, the SITE MBO-T (with timer)reduces labor costs, improves the quality of your research and/or increases product yield.

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Enhanced SVG System

SITE's Enhanced SVG systems are completely-improved (enhanced), affordable tracks of the venerable 81- and 86-style design. SITE has upgraded the performance of these workhorses with its advanced spin and bake modules as well as other improvements. SITE modules yield better-than-original process uniformity. For less critical processes, SITE's Enhanced SVG tools are an economical alternative.