JPEG, 305 dpi, .ZIP download JPEG, 305 dpi, .SIT download

Santa Clara, CA, March 6, 2002 – SITE Services, Inc., a Silicon Valley-based manufacturer of advanced semiconductor capital equipment, announced today the introduction of its SpinBall™ Process Station, a spin coater/developer single-wafer process system developed specifically for R&D labs and specialty production fabs.

Designed for the application of a variety of photolithography chemicals, the SpinBall Process Station provides uniform, precise and repeatable process results through its advanced aerodynamic cup design.

“As the industry increasingly embraces 300mm technology, uniformity across the larger wafer size is imperative to assuring increased yields,” said Alan Kukas, president and CEO of SITE Services. “The quality of the process results sets the SpinBall product apart from similar systems. For R&D, this means more realistic results when transferring the process to automated systems in the fab.”

Based on SITE’s field-proven, fully-automated Tractrix™ platform, the SpinBall Process Station can be ordered for coating, developing or cleaning. The system can process a wide range of substrates including rounds and squares.

The SpinBall system can be equipped with a low-cost, accurate cartridge dispense system for high viscosity materials or standard photoresist. Optional process features include backside rinse and topside edge bead removal (EBR).

The SpinBall Process Station has a compact footprint (19” x 32”) and allows for self-contained process chemical and waste storage. The company is shipping this product effective Q2 2002.

About SITE Services, Inc.

SITE Services, Inc. is a manufacturer of automated wafer processing equipment for the global semiconductor industry. Founded in 1980, the company designs, manufactures and markets innovative equipment used in the semiconductor photolithography process. The company’s corporate headquarters is located at: 690 Aldo Avenue, Santa Clara, CA 95054-2207 USA Tel: 408-980-1155, Fax: 408-980-1267, e-mail: .

SpinBall and Tractrix are trademarks of SITE Services, Inc.