SITE’s Enhanced SVG 86 Coater Cup Assembly is easier to clean and delivers superior process performance.

• Improved coat uniformity
• Eliminates splashback
• Built-in backside EBR nozzle
• Reduces particle contamination
• Very easy to service

SITE’s 3P HPO (three-pin hot plate oven) module is a drop-in replacement with:

• Tighter temperature regulation
• More supported area under the wafer
• Wear-resistant heater surface
• "Fuzzy" logic control (virtually calibration-free)
• Solid state vacuum switch with digital display