The Tractrix™ Spin Track tool has edge bead removal (EBR) capabilities and is a stand alone, small-footprint track system designed for the spin deposition of photoresist, developer, polymer and other materials common to integrated circuit photolithography. Built with the philosophy of 'one controller for one track', the Tractrix™ Spin Track tool is highly reliable. Its proprietary, single-axis linear transfer arm (LTA) will gently and efficiently transport substrates ranging from 2 inches to 200 mm between the process modules.

Owing to its unique, efficient design, the Tractrix™ system is easier to operate and requires far less maintenance than any other track system utilizing multi-axis robotic transfer. The tool's flexibility makes it a low-cost solution for production, R&D, special applications, or as a backup system when other tracks are off-line for maintenance. Whether your process is g-line, i-line, DUV, low-k dielectric or something completely unique, SITE's Tractrix™ system can be configured accordingly.

For more information on edge bead removal (EBR) or our edge bead removers, please browse our site.

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