Santa Clara, CA, May 16, 2003 – SITE Services, Inc., a Silicon Valley manufacturer of advanced semiconductor capital equipment introduces the Tractrix™ XP Combo spin track system . Building upon SITE’s industry-proven Tractrix™ 0.5 micron technology, the Tractrix™ XP Combo offers typical process flows for coat bake chill and PEB chill develop. Process programs and flows are created and optimized under the intuitive Windows XP graphical user interface.

“This new Tractrix™ XP Combo system,” reports Alan Kukas, CEO, “can be equipped with temperature and RH control and amine filtration for use with chemically-amplified resist. The EZ-Switch™ Size Change feature enables fast, easy setups for processing different size substrates and the Sof-Touch™ Wafer Handling feature is perfect for working with fragile substrates.”

At nearly half the cost and size of competitive systems, the Tractrix™ XP Combo has an exceptionally small footprint (19” x 81”) and may be configured for processing substrates ranging in size from 2” to 200mm.

About SITE Services, Inc.

With 20 years of experience, SITE Services, Inc. is dedicated to the innovative design, manufacture and marketing of flexible, cost-effective automated wafer processing equipment for the global semiconductor industry. SITE Services, Inc.'s corporate headquarters are located at: 690 Aldo Avenue, Santa Clara, CA 95054-2207 USA Tel: 408-980-1155, Fax: 408-980-1267, e-mail: , web: www.site.com